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Resistivity Mapping System ? Prometrix RS Series
Film Thickness Mapping System ? Prometrix SM & FT Series
The Prometrix RS Series collects and analyzes sheet resistance data on various conductive layers such as implants, diffusions, epi, CVD, metals and bulk substrates. Provides accurate and repeatable sheet resistance
SPEC follows all KLA/Tencor refurbishment procedures and utilizes certified technicians.
| Install New Laser Verify Resistivity or Thickness |
| Probe qualification |
| Clean & lubricate Stage Lead-screw and Stage?s door |
| Re-Anodize Stage |
| Refurbish Load Arm |
| Verify ART all diagnostic LEDs |
| Verify ART system proper completion Reset |
| Verify and adjust all DC powers to OEM |
| Refurbish all wiring or replace |
| Refurbish Monitor or replace |
| Verify Low current battery |
| Skins / panels will be anodized or repainted with particle free paint. (System calibrated to OEM spec) System calibration: ensure system has calibrated to meet the original specifications |
Contact us today for a free consultation and price quotation. |
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See our inventory KLA-Tencor equipment for purchase |
